Technical And Scientific Resources A well equipped semiconductor research laboratory is available, comprising 150m2 of air conditioned laboratory space with a clean room rating of class 10-100.

Microelectronics processing facilities include: Nine fume cupboards Spin rinser Deionised water Fifteen diffusion and oxidation furnaces (for wafers up to 125 mm diameter) Three liquid phase epitaxy (LPE) furnaces Two photolithographic mask aligners and resist spinners Two metal evaporation systems Electroplating equipment A laser scriber with x-y table and IR & green emission Two high speed dicing saws LPCVD system for silicon nitride

Characterisation facilities includes: Electron and optical microscopes IV testers Spectral response analyser photoconductive decay contactless lifetime tester Deep level transient spectroscopy CV tester Secondary ion mass spectrometer Hall effect Polaron differential C-V analyser X-ray diffraction Photoluminescence Surface profiler Fourier transform infrared spectroscopy Spectrophotometers with integrating spheres Rutherford backscattering Raman spectroscopy ANU Supercomputer Facility

Related Departments at ANU Department of Electronic Materials Engineering ANU Supercomputer Facility Laser Physics Department Plasma Physics Department